A focused laser lithographic system (FLLS) has been constructed. Details of the construction of this system and its performance are given. Results indicate that certain modifications to the system will enable it to rival much more expensive systems.
© 1978 Optical Society of America
R. A. Becker, B. L. Sopori, and W. S. C. Chang, "Focused laser lithographic system," Appl. Opt. 17, 1069-1071 (1978)