An IR Twyman-Green interferometer is described. It uses a cw CO2 laser as a light source operating at a 10.6-µm wavelength. Theoretical analysis and experimental measurements of the relationship between the contrast of the interference fringes and the rms roughness of test surfaces are discussed. Interferometric testing results and special alignment methods are shown for rough surface optics.
© 1980 Optical Society of America
Osuk Kwon, J. C. Wyant, and C. R. Hayslett, "Rough surface interferometry at 10.6 µm," Appl. Opt. 19, 1862-1869 (1980)