This paper has characterized and measured scatter from high efficiency and reflective diffraction gratings. Three major types of scatter are identified: (1) random, which occurs over 27π sr; (2) band or ghost scatter, which occurs in the plane of incidence; and (3) structured scatter, which is a symmetrical pattern repeated about each order. Measurements were taken at 10.6 Am on gratings made by ruling, ion etching, holography, or a combination of these techniques. We found that the characteristic scatter from these high efficiency gratings depends strongly on the way the gratings are fabricated.
© 1980 Optical Society of America
G. J. Dunning and M. L. Minden, "Scattering from high efficiency diffraction gratings," Appl. Opt. 19, 2419-2425 (1980)