John S. Hartman,
Richard L. Gordon,
and Delbert L. Lessor
The authors are with the Pacific Northwest Laboratory, Richland, Washington 99352, which is operated for the U.S. Department of Energy by the Battelle Memorial Institute. USA
John S. Hartman, Richard L. Gordon, and Delbert L. Lessor, "Quantitative surface topography determination by Nomarski reflection microscopy. 2: Microscope modification, calibration, and planar sample experiments," Appl. Opt. 19, 2998-3009 (1980)
The application of reflective Nomarski differential interference contrast microscopy for the determination of quantitative sample topography data is presented. The discussion includes a review of key theoretical results presented previously plus the experimental implementation of the concepts using a commercial Nomarski microscope. The experimental work included the modification and characterization of a commercial microscope to allow its use for obtaining quantitative sample topography data. System usage for the measurement of slopes on flat planar samples is also discussed. The discussion has been designed to provide the theoretical basis, a physical insight, and a cookbook procedure for implementation to allow these results to be of value to both those interested in the microscope theory and its practical usage in the metallography laboratory.
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Alignment Sequence for Nomarski Microscope Components
1.
Install the standard objective lens.
2.
Adjust the polarizer for extinction without changing the analyzer.
3.
Remove the standard objective lens and install the Nomarski objective assembly.
4.
If the output beam is still extinguished, record the directions of the rotatable polarizer and analyzer. This will occur only when the polarizer and analyzer are parallel to the prism optical axes.
5.
If the output beam is not extinguished, rotate the analyzer a small amount and repeat steps 1–5. Otherwise proceed to step 6.
6.
Rotate polarizer 45° from final setting obtained in step 4. record the polarizer setting.
7.
Install standard objective lens.
8.
Adjust analyzer for extinction with the new polarizer position. record the analyzer setting.
9.
Install the Nomarski objective assembly.
Table II
Comparison of Results from Linear and Nonlinear Regression
SE = standard error of estimate of calculated intensity I to the experimental values. E(O) stands for even (odd) points in the set. Data increment = 0.001 in.
Standard error of estimate.
Data increment = 0.005 in. E(O) stands for even (odd) points of the set. Data increment = 0.001 in.
Table V
Tilt Angles Determined by Nonlinear Regression on Intensity Data
Data set
ψ0, deg
, deg
, deg
ϕ0, deg
7901
3.422
3.337
0.085
−0.480
7902
2.354
1.878
0.476
+1.08
7903
1.650
1.575
0.075
−0.082
7904
1.650
1.562
0.088
+0.095
7905
1.129
1.177
−0.048
+7.68
7906
0.750
0.716
0.034
+2.06
7907
0.750
0.796
−0.046
−0.101
7908
3.033
2.834
0.199
−0.847
7909
3.033
2.883
0.150
+0.466
Tables (5)
Table I
Alignment Sequence for Nomarski Microscope Components
1.
Install the standard objective lens.
2.
Adjust the polarizer for extinction without changing the analyzer.
3.
Remove the standard objective lens and install the Nomarski objective assembly.
4.
If the output beam is still extinguished, record the directions of the rotatable polarizer and analyzer. This will occur only when the polarizer and analyzer are parallel to the prism optical axes.
5.
If the output beam is not extinguished, rotate the analyzer a small amount and repeat steps 1–5. Otherwise proceed to step 6.
6.
Rotate polarizer 45° from final setting obtained in step 4. record the polarizer setting.
7.
Install standard objective lens.
8.
Adjust analyzer for extinction with the new polarizer position. record the analyzer setting.
9.
Install the Nomarski objective assembly.
Table II
Comparison of Results from Linear and Nonlinear Regression
SE = standard error of estimate of calculated intensity I to the experimental values. E(O) stands for even (odd) points in the set. Data increment = 0.001 in.
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