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Applied Optics

Applied Optics


  • Vol. 20, Iss. 15 — Aug. 1, 1981
  • pp: 2597–2600

Elimination of micro-inhomogeneities in a ruby laser beam for improved semiconductor device processing

J. F. Giuliani and W. T. Anderson, Jr.  »View Author Affiliations

Applied Optics, Vol. 20, Issue 15, pp. 2597-2600 (1981)

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No abstract available.

Original Manuscript: April 6, 1981
Published: August 1, 1981

J. F. Giuliani and W. T. Anderson, "Elimination of micro-inhomogeneities in a ruby laser beam for improved semiconductor device processing," Appl. Opt. 20, 2597-2600 (1981)

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