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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 20, Iss. 15 — Aug. 1, 1981
  • pp: 2597–2600

Elimination of micro-inhomogeneities in a ruby laser beam for improved semiconductor device processing

J. F. Giuliani and W. T. Anderson, Jr.  »View Author Affiliations


Applied Optics, Vol. 20, Issue 15, pp. 2597-2600 (1981)
http://dx.doi.org/10.1364/AO.20.002597


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No abstract available.

History
Original Manuscript: April 6, 1981
Published: August 1, 1981

Citation
J. F. Giuliani and W. T. Anderson, "Elimination of micro-inhomogeneities in a ruby laser beam for improved semiconductor device processing," Appl. Opt. 20, 2597-2600 (1981)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-20-15-2597


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References

  1. T. H. Maiman, Nature 187, 493 (1960).
  2. R. J. Collins, D. F. Nelson, A. L. Schawlow, W. Bond, C. G. B. Garrett, W. Kaiser, Phys. Rev. Lett. 5, 303 (1960).
  3. T. H. Maiman, R. H. Hoskins, L. J. D'Haenens, C. K. Asawa, V. Evtuhov, Phys. Rev. 123, 1151 (1961).
  4. E. S. Dayhoff, in Quantum Electronics III, Vol. 2, P. Grivet, N. Bloembergen, Eds. (Columbia U. P., New York, 1964), p. 1445.
  5. L. Tonks, J. Appl. Phys. 33, 540 (1962).
  6. V. V. Korobkin, A. M. Leontovich, N. M. Popova, M. Ya. Schelev, JETP Lett. 3, 194 (1966).
  7. A. G. Cullis, H. C. Weber, P. Bailey, J. Phys. E: 12, 688 (1979).
  8. J. A. Baker, C. W. Peters, Appl. Opt. 1, 674 (1962).

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