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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 20, Iss. 15 — Aug. 1, 1981
  • pp: 2665–2669

Nomarski differential interference contrast microscopy for surface slope measurements: an examination of techniques

J. S. Hartman, R. L. Gordon, and D. L. Lessor  »View Author Affiliations


Applied Optics, Vol. 20, Issue 15, pp. 2665-2669 (1981)
http://dx.doi.org/10.1364/AO.20.002665


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Abstract

Alternate measurement and data analysis procedures are discussed and compared for the application of reflective Nomarski differential interference contrast microscopy for the determination of surface slopes. The discussion includes the interpretation of a previously reported iterative procedure using the results of a detailed optical model and the presentation of a new procedure based on measured image intensity extrema. Surface slope determinations from these procedures are presented and compared with results from a previously reported curve fit analysis of image intensity data. The accuracy and advantages of the different procedures are discussed.

© 1981 Optical Society of America

History
Original Manuscript: March 7, 1981
Published: August 1, 1981

Citation
J. S. Hartman, R. L. Gordon, and D. L. Lessor, "Nomarski differential interference contrast microscopy for surface slope measurements: an examination of techniques," Appl. Opt. 20, 2665-2669 (1981)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-20-15-2665


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References

  1. G. Nomarski, J. Phys. Rad. 16, 9S (1955).
  2. G. Nomarski, A. R. Weill, Rev. Metall. 52, 121 (1955).
  3. U. Bertocci, T. S. Noggle, Rev. Sci. Instrum. 37, 1750 (1966).
  4. D. L. Lessor, J. S. Hartman, R. L. Gordon, J. Opt. Soc. Am. 69, 357 (1979).
  5. J. S. Hartman, R. L. Gordon, D. L. Lessor, Appl. Opt. 19, 2998 (1980).
  6. J. S. Hartman, R. L. Gordon, D. L. Lessor, Proc. Soc. Photo-Opt. Instrum. Eng. 192, 223 (1980).
  7. Reference to a company or product name does not imply approval or recommendation from the Pacific Northwest Laboratory or the U.S. Department of Energy to the exclusion of others that may be suitable.

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