A compact monochromator has been designed to utilize recently developed free-standing XUV transmission gratings. Tests using a condensed spark source of far UV radiation show that this monochromator, with 20-µm slits, is capable of 0.08-nm resolution at 30 nm in the first order. A physical description of the system and test results are presented.
© 1981 Optical Society of America
P. J. Caldwell, E. T. Arakawa, and T. A. Callcott, "Extreme ultraviolet transmission grating monochromator," Appl. Opt. 20, 3047-3049 (1981)