OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 20, Iss. 18 — Sep. 15, 1981
  • pp: 3184–3188

Plasma silicon oxide films on garnet substrates: measurement of their thickness and refractive index by the prism coupling technique

T. W. Hou and C. J. Mogab  »View Author Affiliations

Applied Optics, Vol. 20, Issue 18, pp. 3184-3188 (1981)

View Full Text Article

Enhanced HTML    Acrobat PDF (657 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



The prism coupling technique has been used to measure the refractive index and thickness of plasma silicon oxide films deposited on garnet substrates. The film thickness is also measured with a mechanical stylus (Talystep) for comparison. A linearly polarized He–Ne laser at 632.8-nm wavelength or a He–Cd laser at 441.6-nm wavelength is used as the light source in the prism coupler. The use of the He–Ne laser is demonstrated to result in a fluctuation in the detector output due to light interference in the substrate. The He–Cd laser is shown to be superior because the substrate is sufficiently absorbing that interference is eliminated. It also permits thickness measurements on thinner films. The agreement between thickness measurements by the prism coupler and the mechanical stylus is within ±0.015 μm for films of 0.4 μm or thicker and ±0.010 μm for thinner films. The error in thickness measurement caused by an error in refractive index assumed or in determining the coupling angles for films thinner than 0.30 μm is also estimated.

© 1981 Optical Society of America

Original Manuscript: May 22, 1981
Published: September 15, 1981

T. W. Hou and C. J. Mogab, "Plasma silicon oxide films on garnet substrates: measurement of their thickness and refractive index by the prism coupling technique," Appl. Opt. 20, 3184-3188 (1981)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. P. K. Tien, R. Ulrich, R. J. Martin, Appl. Phys. Lett. 14, 291 (1969).
  2. P. K. Tien, R. Ulrich, J. Opt. Soc. Am. 60, 1325 (1970). [CrossRef]
  3. P. K. Tien, Appl. Opt. 10, 2395 (1971). [CrossRef] [PubMed]
  4. R. Ulrich, R. Torge, Appl. Opt. 12, 2901 (1973). [CrossRef] [PubMed]
  5. D. P. Schinke, R. G. Smith, M. A. Karr, D. R. Mackenzie, at Conference on Laser Engineering and Applications, Washington, D. C., 1–3 June 1977, paper 2.1.
  6. R. T. Kersten, Opt. Acta 22, 503 (1975). [CrossRef]
  7. P. A. Barnes, D. P. Schinke, Appl. Phys. Lett. 30, 26 (1977). [CrossRef]
  8. M. Olivier, J. C. Peuzin, Appl. Phys. Lett. 32, 386 (1978). [CrossRef]
  9. A. C. Adams, D. P. Schinke, C. D. Capio, J. Electrochem. Soc. 126, 1539 (1979). [CrossRef]
  10. J. R. Hollahan, J. Electrochem. Soc. 126, 930 (1979). [CrossRef]
  11. S. L. Blank, R. Wolfe, L. C. Luther, R. C. LeGraw, T. J. Nelson, W. A. Biolsi, J. Appl. Phys. 50, 2155 (1979). [CrossRef]
  12. M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1965), p. 62.
  13. T. W. Hou, unpublished results.
  14. T. J. Nelson et al., Bell Syst. Tech. J. 59, 229 (1980).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited