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Applied Optics

Applied Optics


  • Vol. 20, Iss. 19 — Oct. 1, 1981
  • pp: 3382–3384

Determination and correction of quadrature fringe measurement errors in interferometers

Peter L. M. Heydemann  »View Author Affiliations

Applied Optics, Vol. 20, Issue 19, pp. 3382-3384 (1981)

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The precision and accuracy of interferometers using quadrature fringe detection are often limited not by the interferometer itself but by the detector system. There are three typical errors: unequal gain in the two channels; quadrature phase shift error; and zero offsets. This paper describes a simple method for determining the quadrature errors from experimental data obtained in the interferometer and correcting for them. A numerical example demonstrating the significant improvement in the precision of interferometer data is given.

© 1981 Optical Society of America

Original Manuscript: May 16, 1981
Published: October 1, 1981

Peter L. M. Heydemann, "Determination and correction of quadrature fringe measurement errors in interferometers," Appl. Opt. 20, 3382-3384 (1981)

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  1. P. L. M. Heydemann, C. R. Tilford, R. W. Hyland, J. Vac. Sci. Technol. 14, 597 (1977). [CrossRef]

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