OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 20, Iss. 23 — Dec. 1, 1981
  • pp: 4000–4008

Optical scales, reticles, gratings, masks, and standards

D. F. Horne  »View Author Affiliations


Applied Optics, Vol. 20, Issue 23, pp. 4000-4008 (1981)
http://dx.doi.org/10.1364/AO.20.004000


View Full Text Article

Enhanced HTML    Acrobat PDF (1864 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Photofabrication techniques using positive photoresists, developed for the quantity production of theodolite circular scales, have been adapted to making master chrome masks for photoetching moiré fringe radial diffraction gratings. Diamond stylus wear, or chipping of the diamond tip, on a precision surface measuring instrument is difficult to detect and can cause incorrect surface texture measurements. A stylus wear standard was developed, and fabrication problems were solved by the anisotropic etching of a silicon slice using a chrome mask and photoresist. An essential feature of this process was precise orientation of the mask with a crystal cleavage plane. Experience gained suggests the means for quantitative quality control of diamond tools used for micromachining.

© 1981 Optical Society of America

History
Original Manuscript: May 8, 1981
Published: December 1, 1981

Citation
D. F. Horne, "Optical scales, reticles, gratings, masks, and standards," Appl. Opt. 20, 4000-4008 (1981)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-20-23-4000

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited