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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 20, Iss. 4 — Feb. 15, 1981
  • pp: 610–618

Optical heterodyne profilometry

Gary E. Sommargren  »View Author Affiliations


Applied Optics, Vol. 20, Issue 4, pp. 610-618 (1981)
http://dx.doi.org/10.1364/AO.20.000610


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Abstract

A noncontact optical technique for the measurement of surface profile is described, which has a height sensitivity of the order of 1 Å. It is based on a common path heterodyne interferometer in which two orthogonally polarized beams of slightly different frequency are focused on the surface to be measured. One focal point acts as a reference as the other point circularly scans the surface. The phase of the beat frequency of the interfering return beams is directly proportional to the surface height. The results of a surface measurement include graphical displays of the surface profile, autocovariance function, spectral density function, stability, and repeatability. Comparison with other instruments is also discussed.

© 1981 Optical Society of America

History
Original Manuscript: June 30, 1980
Published: February 15, 1981

Citation
Gary E. Sommargren, "Optical heterodyne profilometry," Appl. Opt. 20, 610-618 (1981)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-20-4-610


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References

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