New laser interferometry has been developed for determination of thickness distributions of low absorbing films on transparent substrates. This technique is suitable for films with either a gradual change or a step change in thickness. With this technique we have obtained fringe patterns showing the 2-D thickness distribution of Se films. This technique is simple and nondestructive without involving computations for films with low absorption and substrates transparent to the laser beam.
© 1982 Optical Society of America
Teruhito Mishima and Kwan C. Kao, "Determination of 2-D thickness distributions of low absorbing thin films by new laser interferometry," Appl. Opt. 21, 2894-2896 (1982)