The possibilities of obtaining the optical constants of very thin films from ellipsometric measurements are analyzed with the help of the approximate Drude formulas. The influence of ellipsometric errors on the determination of the optical constants of thin films is examined. It is shown that the accuracy is extremely small when the dielectric constant ε˜ of the thin film is equal to the refractive index of the substrate [equation].
© 1982 Optical Society of America
G. Vuye and T. López-Ríos, "Precision in the ellipsometric determination of the optical constants of very thin films," Appl. Opt. 21, 2968-2971 (1982)