OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 21, Iss. 16 — Aug. 15, 1982
  • pp: 2972–2977

Principal angle spectroscopic ellipsometry utilizing a rotating analyzer

D. Chandler-Horowitz and G. A. Candela  »View Author Affiliations

Applied Optics, Vol. 21, Issue 16, pp. 2972-2977 (1982)

View Full Text Article

Enhanced HTML    Acrobat PDF (644 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



The variations of the intensity of the reflected light near null as a function of the angle of incidence are compared for three ellipsometric techniques. For films of either SiO2 or Si3N4 on silicon, the highest accuracy of the film thickness measurement is always obtained when the angle of incidence is either equal or nearly equal to the principal angle for all thicknesses of the film layer. Based on these results, it is shown that a variable angle of incidence spectroscopic ellipsometer operated at the principal angle of incidence and using a rotating analyzer combines the advantage of versatility with near maximum accuracy and sensitivity.

© 1982 Optical Society of America

Original Manuscript: April 17, 1982
Published: August 15, 1982

D. Chandler-Horowitz and G. A. Candela, "Principal angle spectroscopic ellipsometry utilizing a rotating analyzer," Appl. Opt. 21, 2972-2977 (1982)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. D. E. Aspnes, in Optical Properties of Solids: New Developments, B. O. Seraphin, Ed. (North-Holland, Amsterdam, 1976), p. 799.
  2. D. E. Aspnes, J. Vac. Sci. Technol. 18, 289 (1981). [CrossRef]
  3. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1977), Chap. 4.
  4. D. E. Aspnes, A. A. Studna, Appl. Opt. 14, 220 (1975). [CrossRef] [PubMed]
  5. C. V. Kent, J. Lawson, J. Opt. Soc. Am. 27, 117 (1937). [CrossRef]
  6. D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974). [CrossRef]
  7. H. M. O’Bryan, J. Opt. Soc. Am. 26, 122 (1936). [CrossRef]
  8. K. Kinosta, M. Yamamoto, Surf. Sci. 56, 64 (1976). [CrossRef]
  9. M. Yamamoto, Opt. Commun. 10, 200 (1974). [CrossRef]
  10. R. M. A. Azzam, A. R. M. Zaghloul, J. Opt. Soc. Am. 67, 1058 (1977). [CrossRef]
  11. M. Yamamoto, O. S. Heavens, Surf. Sci. 96, 202 (1980). [CrossRef]
  12. D. E. Aspnes, Appl. Opt. 14, 1131 (1975). [CrossRef] [PubMed]
  13. U. Merkt, Appl. Opt. 20, 307 (1981). [CrossRef] [PubMed]
  14. G. H. Bu-Abbud, N. M. Bashara, Appl. Opt. 20, 3020 (1981). [CrossRef] [PubMed]
  15. M. M. Ibrahim, N. M. Bashara, J. Opt. Soc. Am. 61, 1622 (1971). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited