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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 22, Iss. 12 — Jun. 15, 1983
  • pp: 1893–1897

Three-beam interferometric profilometer

Kais Almarzouk  »View Author Affiliations


Applied Optics, Vol. 22, Issue 12, pp. 1893-1897 (1983)
http://dx.doi.org/10.1364/AO.22.001893


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Abstract

A noncontact optical technique for the measurement of thin-film thickness and surface roughness with 25-Å and 2-μm vertical and horizontal resolutions, respectively, has been described. It is based on a common-path three-beam shearing interferometer, in which the outer beams act as a reference while the middle beam scans the surface. The results of this technique are comparable with the ones obtained with a stylus instrument.

© 1983 Optical Society of America

History
Original Manuscript: July 16, 1982
Published: June 15, 1983

Citation
Kais Almarzouk, "Three-beam interferometric profilometer," Appl. Opt. 22, 1893-1897 (1983)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-22-12-1893


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References

  1. S. Tolansky, Multiple-Beam Interferometry of Surfaces and Films (Clarendon, Oxford, 1943).
  2. J. M. Bennett, Appl. Opt. 15, 2705 (1976). [CrossRef] [PubMed]
  3. D. Malacara, Optical Shop Testing (Wiley, New York, 1978), pp. 19, 47, and 130.
  4. At least two famous stylus instruments are available commercially: Detak, manufactured by Sloan Technology Corp., Santa Barbara, Calif.; and Talystep, manufactured by Rank Precision Industries, Ltd., Leicester, England.
  5. F. Zernike, J. Opt. Soc. Am. 40, 326 (1950). [CrossRef]
  6. R. E. Kinzly, Appl. Opt. 6, 137 (1967). [CrossRef] [PubMed]
  7. P. Hariharan, D. Sen, J. Sci. Instrum. 36, 70 (1959). [CrossRef]
  8. R. C. Tyagi, K. Singh, Appl. Opt. 7, 1971 (1968). [CrossRef] [PubMed]

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