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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 22, Iss. 13 — Jul. 1, 1983
  • pp: 2022–2025

Linewidth measurement by high-pass filtering: a new look

M. Young  »View Author Affiliations


Applied Optics, Vol. 22, Issue 13, pp. 2022-2025 (1983)
http://dx.doi.org/10.1364/AO.22.002022


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Abstract

Earlier workers have noticed that high-pass filtering produces a sharp dark line in precisely the location of the geometrical image of an edge. They proposed using this fact as an aid in measuring linewidth in microscopy but found that the other edge of the line caused significant error. In this paper, I examine that error as a function of normalized linewidth and normalized spatial-filter width and find that it may be limited to ±5% or so, provided that the spatial filter subtends between 0.25 and 0.3× the numerical aperture of the objective and that the linewidth exceeds about twice the resolution limit.

© 1983 Optical Society of America

History
Original Manuscript: February 19, 1983
Published: July 1, 1983

Citation
M. Young, "Linewidth measurement by high-pass filtering: a new look," Appl. Opt. 22, 2022-2025 (1983)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-22-13-2022


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References

  1. K. G. Birch, “A spatial frequency filter to remove zero frequency,” Opt. Acta 15, 113–127 (1968).
  2. R. E. Swing, “The theoretical basis of a new method for the accurate measurement of small line-widths,” in Proc. SPIE, Vol. 80, Developments in Semiconductor Microlithography, pp. 65–77 (1976). [CrossRef]
  3. P. J. S. Hutzler, “Spatial frequency filtering and its application to microscopy,” Appl. Opt. 16, 2264–2272 (1977). [CrossRef] [PubMed]
  4. M. Young, Optics and Lasers, An Engineering Physics Approach (Springer, New York, 1977), Chap. 6.
  5. M. Abramowitz, I. A. Stegun, Eds. Handbook of Mathematical Functions, Nat. Bur. Stds. (U.S.), Appl. Math. Series, Vol. 55, 1964 (reprinted by Dover, New York, 1965), Sect. 5.2, eqs. 1, 14, 36, 37.

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