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Applied Optics

Applied Optics


  • Vol. 22, Iss. 20 — Oct. 15, 1983
  • pp: 3169–3176

Thermal-wave detection and thin-film thickness measurements with laser beam deflection

Jon Opsal, Allan Rosencwaig, and David L. Willenborg  »View Author Affiliations

Applied Optics, Vol. 22, Issue 20, pp. 3169-3176 (1983)

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A new technique has been developed that employs highly focused laser beams for both generating and detecting thermal waves in the megahertz frequency regime. This technique includes a comprehensive 3-D depth-profiling theoretical model; it has been used to measure the thickness of both transparent and opaque thin films with high spatial resolution. Thickness sensitivities of ±2% over the 500–25,000-Å range have been obtained for Al and SiO2 films on Si substrates.

© 1983 Optical Society of America

Original Manuscript: April 2, 1983
Published: October 15, 1983

Jon Opsal, Allan Rosencwaig, and David L. Willenborg, "Thermal-wave detection and thin-film thickness measurements with laser beam deflection," Appl. Opt. 22, 3169-3176 (1983)

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