OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 22, Iss. 24 — Dec. 15, 1983
  • pp: 3983–3987

Optical profilometer: a practical approximate method of analysis

Marek Dobosz  »View Author Affiliations

Applied Optics, Vol. 22, Issue 24, pp. 3983-3987 (1983)

View Full Text Article

Enhanced HTML    Acrobat PDF (637 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



An optical noncontact profilometer that combines features of other instruments of this type is described. Three measurement ranges are possible. A resolution of ∼2 nm over a 1-μm range is experimentally demonstrated. The mathematical description of the method, based on the theory of the Gaussian laser beam, gives a simple analytical form that allows convenient application and optimization over a wide range. Validity of the theory is experimentally verified.

© 1983 Optical Society of America

Original Manuscript: July 20, 1983
Published: December 15, 1983

Marek Dobosz, "Optical profilometer: a practical approximate method of analysis," Appl. Opt. 22, 3983-3987 (1983)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. T. L. Williams, Opt. Acta 25, 1155 (1978). [CrossRef]
  2. T. Sawatari, R. B. Ziplin, Opt. Eng. 18, 222 (1978).
  3. F. T Arecchi, D. Bertani, S. Ciliberto, Opt. Commun. 31, 263 (1979). [CrossRef]
  4. S. Uchida, H. Sato, M. O-hori, Ann. CIRP 28, 419 (1979).
  5. M. Shiraishi, “In Process Measurement of Surface Roughness in Machining by Double Beam Method” in Proceedings, Fourth International Conference of Production Engineering, Tokyo (1980).
  6. L. Parker, Laser Focus 7, 40 (1980).
  7. Y. Fainman, E. Lenz, J. Shamir, Appl. Opt. 21, 3200 (1982). [CrossRef] [PubMed]
  8. H. Kogelnik, T. Li, Proc. IEEE 54, 1312 (1966). [CrossRef]
  9. L. D. Dickson, Appl. Opt. 9, 1854 (1970). [CrossRef] [PubMed]
  10. R. Jóźwicki, Optyka 1, 7 (1977) (in Polish).
  11. A. Yoshida, T. Asakura, Optik 41, 281 (1974).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited