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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 22, Iss. 24 — Dec. 15, 1983
  • pp: 3983–3987

Optical profilometer: a practical approximate method of analysis

Marek Dobosz  »View Author Affiliations


Applied Optics, Vol. 22, Issue 24, pp. 3983-3987 (1983)
http://dx.doi.org/10.1364/AO.22.003983


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Abstract

An optical noncontact profilometer that combines features of other instruments of this type is described. Three measurement ranges are possible. A resolution of ∼2 nm over a 1-μm range is experimentally demonstrated. The mathematical description of the method, based on the theory of the Gaussian laser beam, gives a simple analytical form that allows convenient application and optimization over a wide range. Validity of the theory is experimentally verified.

© 1983 Optical Society of America

History
Original Manuscript: July 20, 1983
Published: December 15, 1983

Citation
Marek Dobosz, "Optical profilometer: a practical approximate method of analysis," Appl. Opt. 22, 3983-3987 (1983)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-22-24-3983


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References

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