An optical noncontact profilometer that combines features of other instruments of this type is described. Three measurement ranges are possible. A resolution of ~2 nm over a 1-µm range is experimentally demonstrated. The mathematical description of the method, based on the theory of the Gaussian laser beam, gives a simple analytical form that allows convenient application and optimization over a wide range. Validity of the theory is experimentally verified.
© 1983 Optical Society of America
Marek Dobosz, "Optical profilometer: a practical approximate method of analysis," Appl. Opt. 22, 3983-3987 (1983)