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Applied Optics

Applied Optics


  • Vol. 22, Iss. 8 — Apr. 15, 1983
  • pp: 1165–1167

Ion polishing with the aid of a planarizing film

Leo F. Johnson and K. A. Ingersoll  »View Author Affiliations

Applied Optics, Vol. 22, Issue 8, pp. 1165-1167 (1983)

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An ion polishing technique employing a planarizing film in conjunction with ion-beam erosion at the planarizing angle was used to remove surface irregularities associated with conventional polishing of optical surfaces. By maintaining a planar surface throughout the erosion process, nonuniform erosion resulting from faceting, redeposition, and ion reflection is eliminated. Smooth surfaces on fused quartz are obtained by erosion of a planarizing film of photoresist at an angle of 60°. The method is applicable to a wide variety of materials and may be useful for removing the surface roughness limitation on the laser-induced damage threshold of optical surfaces.

© 1983 Optical Society of America

Original Manuscript: January 6, 1983
Published: April 15, 1983

Leo F. Johnson and K. A. Ingersoll, "Ion polishing with the aid of a planarizing film," Appl. Opt. 22, 1165-1167 (1983)

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