OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 22, Iss. 8 — Apr. 15, 1983
  • pp: 1247–1250

Substrate parameter determination for thin film spectrophotometric measurement correction

M. Matzeu and A. Panatta  »View Author Affiliations

Applied Optics, Vol. 22, Issue 8, pp. 1247-1250 (1983)

View Full Text Article

Enhanced HTML    Acrobat PDF (406 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A method of obtaining accurate values for the optical parameters of thin film substrates is described. Calculations for reflected and transmitted fluxes in substrate sets are developed allowing for double reflection. A simple procedure to fit measurements is also illustrated. Values for substrate parameters are extracted and used to correct for substrate influence in thin film spectrophotometric measurements. Corrected thin film measurements and data calculated with obtained optical constants are compared.

© 1983 Optical Society of America

Original Manuscript: August 16, 1982
Published: April 15, 1983

M. Matzeu and A. Panatta, "Substrate parameter determination for thin film spectrophotometric measurement correction," Appl. Opt. 22, 1247-1250 (1983)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. J. P. Marton, M. Schlesinger, J. Appl. Phys. 40, 4529 (1969). [CrossRef]
  2. G. Baldini, L. Rigaldi, J. Opt. Soc. Am. 60, 495 (1970). [CrossRef]
  3. A. Panatta, M. Matzeu, unpublished.
  4. F. Abelès, in Advanced Optical Techniques, A. C. S. van Heel, Ed. (North-Holland, Amsterdam, 1967).
  5. H. L. Alder, E. R. Roessler, Introduction to Probability and Statistics (Freeman, San Francisco, 1964).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited