It is made clear theoretically and experimentally how the 3-D index distribution in a planar microlens is formed in the fabrication process. The combination of both drift and thermal diffusion of ions plays an important role in achieving an index profile for low aberration. The lens dimension and migration time are determined mainly by ion drift aided by the electric field. A very strong concentration dependency exists in the diffusion coefficient and this brings about an upward convex index shape up to the periphery resulting in full utilization of the index difference.
© 1984 Optical Society of America
Original Manuscript: December 1, 1983
Published: June 1, 1984
Masahiro Oikawa, Kenichi Iga, Motoyasu Morinaga, Tetsuo Usui, and Takashi Chiba, "Distributed-index formation process in a planar microlens," Appl. Opt. 23, 1787-1789 (1984)