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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 23, Iss. 11 — Jun. 1, 1984
  • pp: 1890–1896

Effect of film transition layers on the Abeles method

Ikuo Awai and Jun-ichi Ikenoue  »View Author Affiliations


Applied Optics, Vol. 23, Issue 11, pp. 1890-1896 (1984)
http://dx.doi.org/10.1364/AO.23.001890


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Abstract

The refractive index measured by the Abeles method can have a serious error because of a film transition layer. The effect is different depending on which side of the film the layer exists. Calculation is chiefly made for a surface transition layer which is more realistic than an inner one in the case of deposited films. The following error characteristics are elucidated for a thin surface transition layer: (1) The error is a cotangent function of the film thickness. (2) It is proportional to the transition layer thickness. (3) It increases as the refractive index along the transition layer gets closer to the averaged index of the air and the film. (4) It is almost independent of the substrate index ns except when ns is close to the film index.

© 1984 Optical Society of America

History
Original Manuscript: December 5, 1983
Published: June 1, 1984

Citation
Ikuo Awai and Jun-ichi Ikenoue, "Effect of film transition layers on the Abeles method," Appl. Opt. 23, 1890-1896 (1984)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-23-11-1890


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References

  1. F. Abeles, “La Determination de l’Indice et de l’Epaisseur des Couches Minces Transparentes,” J. Phys. Radium 11, 310 (1950). [CrossRef]
  2. M. Hacskaylo, “Refractive Index of Thin Dielectric Films,” J. Opt. Soc. Am. 54, 198 (1964). [CrossRef]
  3. R. J. King, S. P. Talim, “A Comparison of Thin Film Measurement by Guided Waves, Ellipsometry and Reflectometry,” Opt. Acta 28, 1107 (1981). [CrossRef]
  4. O. S. Heavens, S. D. Smith, “Dielectric Thin Films,” J. Opt. Soc. Am. 47, 469 (1957). [CrossRef]
  5. G. Koppelmann, K. Krebs, “Die Optischen Eigenschaften Dielectricher Schichten mit Kleinen Homogenitätsstörungen,” Z. Phys. 163, 539 (1961). [CrossRef]
  6. P. Rouard, P. Bousquet, “Optical Constants of Thin Films,” Prog. Opt. 4, 147 (1965).
  7. G. Rasigni, F. Varnier, J. P. Palmari, N. Mayani, M. Rasigni, A. Llebaria, “Study of Surface Roughness for Thin Films of CaF2 Deposited on Glass-Substrates,” Opt. Commun. 46, 294 (1983). [CrossRef]
  8. J. E. Goell, R. D. Standley, “Effect of Refractive Index Gradients on Index Measurement by the Abeles Method,” Appl. Opt. 11, 2502 (1972). [CrossRef] [PubMed]

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