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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 23, Iss. 16 — Aug. 15, 1984
  • pp: 2744–2746

Low temperature plasma chemical vapor deposition of silicon oxynitride thin-film waveguides

D. K. W. Lam  »View Author Affiliations


Applied Optics, Vol. 23, Issue 16, pp. 2744-2746 (1984)
http://dx.doi.org/10.1364/AO.23.002744


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Abstract

The use of plasma chemical vapor deposition (PCVD) of silicon oxynitride (Si x O y N z ) thin films on Si substrates at the very low temperature of 200°C is reported. Such a low deposition temperature would allow these films to be deposited on substrates with low decomposition or melting temperature. This is particularly significant to some of the important III–V compounds such as GaAs and InP. Another advantage of this low temperature deposition process is that undesired diffusion of dopants already present in the semiconductor substrates is reduced during film deposition. The details on the deposition procedures and the optical characteristics of the films are reported in this paper.

© 1984 Optical Society of America

History
Original Manuscript: March 12, 1984
Published: August 15, 1984

Citation
D. K. W. Lam, "Low temperature plasma chemical vapor deposition of silicon oxynitride thin-film waveguides," Appl. Opt. 23, 2744-2746 (1984)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-23-16-2744


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References

  1. P. G. McMullin, U.S. Patent4,186,409 (Jan.1980).
  2. L. D. Cornerford, U.S. Patent4,079,404 (Mar.1978).
  3. M. J. Rand, R. D. Standley, “Silicon Oxynitride Films on Fused Silica for Optical Waveguides,” Appl. Opt. 11, 2482 (1972). [CrossRef] [PubMed]
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  8. S. Dutta, H. E. Jackson, J. T. Boyd, R. L. Davies, F. S. Hickernell, “CO2 Laser Annealing of Si3N4, Nb2O5, and Ta2O5 Thin Film Optical Waveguides to Achieve Scattering Loss Reaction,” IEEE J. Quantum Electron. QE-18, 800 (1982). [CrossRef]
  9. S. Dutta, H. E. Jackson, J. T. Boyd, “Reduction of Scattering From a Glass Thin-Film Optical Waveguide by CO2 Laser Annealing,” Appl. Phys. Lett. 37, 512 (1980). [CrossRef]
  10. W. Stutius, W. Streifer, “Silicon Nitride Films on Silicon for Optical Waveguides,” Appl. Opt. 16, 3218 (1977). [CrossRef] [PubMed]
  11. D. Marcuse, Theory of Dielectric Optical Waveguides (Academic, New York, 1974).

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