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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 23, Iss. 16 — Aug. 15, 1984
  • pp: 2830–2834

Disk-memory pregroove inspection

Hidekazu Sekizawa, Kiyoshi Yamada, and Akito Iwamoto  »View Author Affiliations


Applied Optics, Vol. 23, Issue 16, pp. 2830-2834 (1984)
http://dx.doi.org/10.1364/AO.23.002830


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Abstract

An optical inspection system has been developed that detects parameter fluctuations in an optical disk pregroove structure (groove pitch, depth, and width). This optical system was devised using a laser diffraction phenomenon. Groove parameters are measured and calculated from diffracted-light intensity ratios; the groove width is calculated from the second-order diffracted-light intensity ratio to that for the first order. The groove depth is given from the first-order ratio to the zeroth-order light intensity. In addition to this groove parameter inspection, this system is capable of groove defect detection using a spatial filter whose passband is designed to be between the zeroth- and the first-order diffracted-light areas.

© 1984 Optical Society of America

History
Original Manuscript: December 19, 1983
Published: August 15, 1984

Citation
Hidekazu Sekizawa, Kiyoshi Yamada, and Akito Iwamoto, "Disk-memory pregroove inspection," Appl. Opt. 23, 2830-2834 (1984)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-23-16-2830

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