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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 23, Iss. 18 — Sep. 15, 1984
  • pp: 3105–3108

Automated phase-measuring profilometry of 3-D diffuse objects

V. Srinivasan, H. C. Liu, and M. Halioua  »View Author Affiliations


Applied Optics, Vol. 23, Issue 18, pp. 3105-3108 (1984)
http://dx.doi.org/10.1364/AO.23.003105


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Abstract

The high resolution surface profile of a 3-D diffuse object is obtained by measurement of the phase distribution across the image of a projected sinusoidal grating deformed by the surface. A shearing polarization interferometer is used for projection. Deformed grating images are detected by an array camera and processed by a microcomputer. Surface height resolutions of better than 10 μm have been attained, limited essentially by electronic quantization noise. In contrast to direct deformed grating analysis, this method, based on phase-shifting interferometric techniques, is capable of accurate measurement even with coarse projected gratings and low density image sensing arrays. Areas of application include industrial quality control, biostereometrics, robotics, and solid modeling for computer graphics.

© 1984 Optical Society of America

History
Original Manuscript: April 13, 1984
Published: September 15, 1984

Citation
V. Srinivasan, H. C. Liu, and M. Halioua, "Automated phase-measuring profilometry of 3-D diffuse objects," Appl. Opt. 23, 3105-3108 (1984)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-23-18-3105

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