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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 23, Iss. 18 — Sep. 15, 1984
  • pp: 3214–3220

Diffraction characteristics of photoresist surface-relief gratings

M. G. Moharam, T. K. Gaylord, G. T. Sincerbox, H. Werlich, and B. Yung  »View Author Affiliations


Applied Optics, Vol. 23, Issue 18, pp. 3214-3220 (1984)
http://dx.doi.org/10.1364/AO.23.003214


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Abstract

Theoretical results from rigorous coupled-wave analysis are compared with experimental diffraction characteristics for holographically formed dielectric photoresist surface-relief gratings with deep grooves (greater than a grating period) and high diffraction efficiency (>85%). The angular selectivity (at a fixed wavelength) and the wavelength selectivity (at a fixed angle of incidence) are presented for both TE and TM incident polarizations. Modeling the gratings as a surface-relief modulated half-space and using rigorous coupled-wave analysis are shown to produce good general agreement with the experimentally measured diffraction characteristics.

© 1984 Optical Society of America

History
Original Manuscript: February 14, 1984
Published: September 15, 1984

Citation
M. G. Moharam, T. K. Gaylord, G. T. Sincerbox, H. Werlich, and B. Yung, "Diffraction characteristics of photoresist surface-relief gratings," Appl. Opt. 23, 3214-3220 (1984)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-23-18-3214


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References

  1. R. A. Bartolini, “Characteristics of Relief Phase Holograms Recorded in Photoresist,” Appl. Opt. 13, 129 (1974). [CrossRef] [PubMed]
  2. F. Iwata, J. Tsujiuchi, “Characteristics of a Photoresist Hologram and Its Replica,” Appl. Opt. 13, 1327 (1974). [CrossRef] [PubMed]
  3. R. Kurtz, R. Owen, “Holographic Recording Materials—A Review,” Opt. Eng. 14, 393 (1975).
  4. M. G. Moharam, T. K. Gaylord, “Diffraction Analysis of Dielectric Surface-Relief Gratings,” J. Opt. Soc. Am. 72, 1385 (1982). [CrossRef]
  5. R. C. Enger, S. K. Case, “High-Frequency Holographic Transmission Gratings in Photoresist,” J. Opt. Soc. Am. 73, 1113 (1983). [CrossRef]
  6. H. Werlich, G. Sincerbox, B. Yung, “Fabrication of High Efficiency Surface Relief Holograms,” IBM Research Report RJ3912 (1983).
  7. C. J. Kramer, “Hologon Laser Scanners for Nonimpact Printing,” Proc. Soc. Photo-Opt. Instrum Eng. 390, 165 (1982).
  8. M. G. Moharam, T. K. Gaylord, “Rigorous Coupled-Wave Analysis of Planar-Grating Diffraction,” J. Opt. Soc. Am. 71, 811 (1981). [CrossRef]
  9. H. Kogelnik, “Coupled Wave Theory for Thick Hologram Gratings,” Bell Syst. Tech. J. 48, 2909 (1969).
  10. For example, M. C. Hutley, Diffraction Gratings (Academic, London, 1982).
  11. T. K. Gaylord, M. G. Moharam, “Thin and Thick Gratings: Terminology Clarification,” Appl. Opt. 19, 3271 (1981). [CrossRef]
  12. C. V. Raman, N. S. N. Nath, “The Diffraction of Light by High Frequency Sound Waves: Part I,” Proc. Indian Acad. Sci. Sect. A 2, 406 (1935).
  13. C. V. Raman, N. S. N. Nath, “The Diffraction of Light by High Frequency Sound Waves: Part II,” Proc. Indian Acad. Sci. Sect. A 2, 413 (1935).
  14. C. V. Raman, N. S. N. Nath, “The Diffraction of Light by High Frequency Sound Waves: Part III,” Proc. Indian Acad. Sci. Sect. A 3, 75 (1936).
  15. C. V. Raman, N. S. N. Nath, “The Diffraction of Light by High Frequency Sound Waves: Part IV,” Proc. Indian Acad. Sci. Sect A 3, 119 (1936).
  16. R. C. Enger, S. K. Case, “Optical Elements with Ultrahigh Spatial-Frequency Surface Corrugations,” Appl. Opt. 22, 3220 (1983). [CrossRef] [PubMed]
  17. M. Gale, K. Knop, Surface Relief Images for Color Reproduction (Focal Press, Woburn, Mass., 1980).

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