OSA's Digital Library

Applied Optics

Applied Optics


  • Vol. 23, Iss. 24 — Dec. 15, 1984
  • pp: 4539–4543

Two-wavelength phase shifting interferometry

Yeou-Yen Cheng and James C. Wyant  »View Author Affiliations

Applied Optics, Vol. 23, Issue 24, pp. 4539-4543 (1984)

View Full Text Article

Enhanced HTML    Acrobat PDF (564 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



This paper describes a technique that combines ideas of phase shifting interferometry (PSI) and two-wavelength interferometry (TWLI) to extend the phase measurement range of conventional single-wavelength PSI. To verify theoretical predictions, experiments have been performed using a solid-state linear detector array to measure 1-D surface heights. Problems associated with TWLPSI and the experimental setup are discussed. To test the capability of the TWLPSI, a very fine fringe pattern was used to illuminate a 1024 element detector array. Without temporal averaging, the repeatability of measuring a surface having a sag of ~100 μm is better than 25-Å (0.0025%) rms.

© 1984 Optical Society of America

Original Manuscript: July 2, 1984
Published: December 15, 1984

Yeou-Yen Cheng and James C. Wyant, "Two-wavelength phase shifting interferometry," Appl. Opt. 23, 4539-4543 (1984)

Sort:  Author  |  Year  |  Journal  |  Reset  


Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited