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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 23, Iss. 24 — Dec. 15, 1984
  • pp: 4539–4543

Two-wavelength phase shifting interferometry

Yeou-Yen Cheng and James C. Wyant  »View Author Affiliations


Applied Optics, Vol. 23, Issue 24, pp. 4539-4543 (1984)
http://dx.doi.org/10.1364/AO.23.004539


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Abstract

This paper describes a technique that combines ideas of phase shifting interferometry (PSI) and two-wavelength interferometry (TWLI) to extend the phase measurement range of conventional single-wavelength PSI. To verify theoretical predictions, experiments have been performed using a solid-state linear detector array to measure 1-D surface heights. Problems associated with TWLPSI and the experimental setup are discussed. To test the capability of the TWLPSI, a very fine fringe pattern was used to illuminate a 1024 element detector array. Without temporal averaging, the repeatability of measuring a surface having a sag of ~100 μm is better than 25-Å (0.0025%) rms.

© 1984 Optical Society of America

History
Original Manuscript: July 2, 1984
Published: December 15, 1984

Citation
Yeou-Yen Cheng and James C. Wyant, "Two-wavelength phase shifting interferometry," Appl. Opt. 23, 4539-4543 (1984)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-23-24-4539


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