This paper describes a technique that combines ideas of phase shifting interferometry (PSI) and two-wavelength interferometry (TWLI) to extend the phase measurement range of conventional single-wavelength PSI. To verify theoretical predictions, experiments have been performed using a solid-state linear detector array to measure 1-D surface heights. Problems associated with TWLPSI and the experimental setup are discussed. To test the capability of the TWLPSI, a very fine fringe pattern was used to illuminate a 1024 element detector array. Without temporal averaging, the repeatability of measuring a surface having a sag of ~100 µm is better than 25-Å (0.0025%) rms.
© 1984 Optical Society of America
Yeou-Yen Cheng and James C. Wyant, "Two-wavelength phase shifting interferometry," Appl. Opt. 23, 4539-4543 (1984)