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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 23, Iss. 4 — Feb. 15, 1984
  • pp: 571–575

Gratings for metrology and process control. 1: A simple parameter optimization problem

Geraldo F. Mendes, Lucila Cescato, and Jaime Frejlich  »View Author Affiliations


Applied Optics, Vol. 23, Issue 4, pp. 571-575 (1984)
http://dx.doi.org/10.1364/AO.23.000571


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Abstract

A simple graphical method is developed for calculating modulation and groove-to-period ratio of a shallow lamellar grating from its diffraction spectra and for simultaneously checking its assumed shape. It applies to both reflection nd transmission and to the conducting or dielectric nature of both the grating and its substrate. The effect of noise and distortion is briefly discussed. The method is illustrated for the limiting case of a reflecting metallic grating. Uses will be presented in subsequent papers.

© 1984 Optical Society of America

History
Original Manuscript: August 18, 1983
Published: February 15, 1984

Citation
Geraldo F. Mendes, Lucila Cescato, and Jaime Frejlich, "Gratings for metrology and process control. 1: A simple parameter optimization problem," Appl. Opt. 23, 571-575 (1984)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-23-4-571


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References

  1. H. P. Kleinknecht, H. Meier, J. Electrochem. Soc. 125, 798(1978). [CrossRef]
  2. E. S. Braga, G. F. Mendes, J. Frejlich, A. P. Mammana, Thin Solid Films 109, 4, 363 (1983). [CrossRef]
  3. J. Frejlich, J. J. Clair, J. Opt. Soc. Am. 67, 1644 (1977), Appendix A. [CrossRef]
  4. H. P. Kleinknecht, H. Meier, Appl. Opt. 19, 525 (1980). [CrossRef] [PubMed]
  5. H. P. Baltes, Ed. Inverse Source Problems in Optics (Springer, Berlin, 1978), p. 42.
  6. R. Petit, Nouv. Rev. Opt. 6, 129 (1975). [CrossRef]
  7. M. G. Moharam, T. K. Gaylord, J. Opt. Soc. Am. 72, 1385 (1982). [CrossRef]
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  9. A. M. J. Huiser, A. Quattropani, H. P. Baltes, Opt. Commun. 41, 149 (1982). [CrossRef]
  10. E. G. Loewen, M. Neviere, D. Maystre, Appl. Opt. 15, 2937 (1976). [CrossRef] [PubMed]
  11. Reference 8 claims from experience that scalar theory may be accurately considered for λ/d ratios < 0.2.
  12. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, New York, 1968).
  13. M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975), 630.

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