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Applied Optics

Applied Optics


  • Vol. 23, Iss. 4 — Feb. 15, 1984
  • pp: 571–575

Gratings for metrology and process control. 1: A simple parameter optimization problem

Geraldo F. Mendes, Lucila Cescato, and Jaime Frejlich  »View Author Affiliations

Applied Optics, Vol. 23, Issue 4, pp. 571-575 (1984)

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A simple graphical method is developed for calculating modulation and groove-to-period ratio of a shallow lamellar grating from its diffraction spectra and for simultaneously checking its assumed shape. It applies to both reflection nd transmission and to the conducting or dielectric nature of both the grating and its substrate. The effect of noise and distortion is briefly discussed. The method is illustrated for the limiting case of a reflecting metallic grating. Uses will be presented in subsequent papers.

© 1984 Optical Society of America

Original Manuscript: August 18, 1983
Published: February 15, 1984

Geraldo F. Mendes, Lucila Cescato, and Jaime Frejlich, "Gratings for metrology and process control. 1: A simple parameter optimization problem," Appl. Opt. 23, 571-575 (1984)

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