OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 23, Iss. 4 — Feb. 15, 1984
  • pp: 576–583

Gratings for metrology and process control. 2: Thin film thickness measurement

Geraldo F. Mendes, Lucila Cescato, and Jaime Frejlich  »View Author Affiliations


Applied Optics, Vol. 23, Issue 4, pp. 576-583 (1984)
http://dx.doi.org/10.1364/AO.23.000576


View Full Text Article

Enhanced HTML    Acrobat PDF (1163 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A method of measuring thin film thickness is described, based on a previous paper where the authors analyzed a graphical means for grating modulation calculation. Metallic or dielectric films on any substrate may be measured, and precision was shown to be comparable with that achieved ellipsometrically at least in the 300–1500-Å thickness range. The method is non-contact and destructive: the grating is recorded on the film. Measurements are simple, requiring a low-power He–Ne laser and a photodetector, and may be carried out at a distance from the sample. Experimental results are presented for three types of sample, including measurements by reflection and transmission.

© 1984 Optical Society of America

History
Original Manuscript: October 27, 1983
Published: February 15, 1984

Citation
Geraldo F. Mendes, Lucila Cescato, and Jaime Frejlich, "Gratings for metrology and process control. 2: Thin film thickness measurement," Appl. Opt. 23, 576-583 (1984)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-23-4-576


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. G. F. Mendes, L. Cescato, J. Frejlich, Appl. Opt. 23, 571 (1984). [CrossRef] [PubMed]
  2. M. Born, E. Wolf, Principles of Optics (Pergamon, New York, 1975), p. 62.
  3. Ellipsometric tables of ellipsometer model L-117 from Gaertner.
  4. See, for example, M. Françon, Progress in Microscopy (Row, Peterson, Elmsford, N.Y., 1961), Chap. 6.
  5. O. S. Heavens, Optical Properties of Thin Solid Films (Dover, New York, 1965), p. 119.
  6. Gaertner Bulletin EA-77 reports an accuracy of 2.5–10 Å for the L-117 ellipsometer (Gaertner Scientific Corp., 1201 Wrightwood Ave., Chicago, Ill. 60614).
  7. A. L. Gauler, Opt. Engl. 21, 991 (1982) reported a 500–Å accuracy. We think 1/10 of a fringe (300–250 Å) or even somewhat less may be obtained depending on the particular sample. In this paper we report ±150-Å accuracy.
  8. A. L. Gauler, Opt. Engl. 21, 991 (1982) reported a 500-Å accuracy. We think 1/10 of a fringe (300–250 Å) or even somewhat less may be obtained depending on the particular sample. In this paper we report ±150-Å accuracy.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited