An ArF* oscillator—amplifier combination yielding 60 mJ at 193 nm with good beam divergence (<0.5 mrad) generates VUV radiation down to 146 nm by SRS in H2 gas. Four anti-Stokes and seven Stokes components are identified. VUV power amounts to several kilowatts.
© 1984 Optical Society of America
H. F. Döbele and B. Rückle, "Application of an argon-fluoride laser system to the generation of VUV radiation by stimulated Raman scattering," Appl. Opt. 23, 1040-1043 (1984)