A 10-Hz Nd:YAG laser system with 0.6-J, 25-nsec pulses was used to produce plasmas which emitted strongly in the soft x-ray region. Spectral, temporal, and spatial characteristics of these plasma emissions are presented together with an application of the source to soft x-ray lithography.
David J. Nagel, Charles M. Brown, M. C. Peckerar, Marshall L. Ginter, J. A. Robinson, Thomas J. Mcllrath, and P. K. Carroll, "Repetitively pulsed-plasma soft x-ray source," Appl. Opt. 23, 1428-1433 (1984)