Repetitively pulsed-plasma soft x-ray source
Applied Optics, Vol. 23, Issue 9, pp. 1428-1433 (1984)
http://dx.doi.org/10.1364/AO.23.001428
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Abstract
A 10-Hz Nd:YAG laser system with 0.6-J, 25-nsec pulses was used to produce plasmas which emitted strongly in the soft x-ray region. Spectral, temporal, and spatial characteristics of these plasma emissions are presented together with an application of the source to soft x-ray lithography.
Citation
David J. Nagel, Charles M. Brown, M. C. Peckerar, Marshall L. Ginter, J. A. Robinson, Thomas J. Mcllrath, and P. K. Carroll, "Repetitively pulsed-plasma soft x-ray source," Appl. Opt. 23, 1428-1433 (1984)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-23-9-1428
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