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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 23, Iss. 9 — May. 1, 1984
  • pp: 1428–1433

Repetitively pulsed-plasma soft x-ray source

David J. Nagel, Charles M. Brown, M. C. Peckerar, Marshall L. Ginter, J. A. Robinson, Thomas J. McIlrath, and P. K. Carroll  »View Author Affiliations


Applied Optics, Vol. 23, Issue 9, pp. 1428-1433 (1984)
http://dx.doi.org/10.1364/AO.23.001428


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Abstract

A 10-Hz Nd:YAG laser system with 0.6-J, 25-nsec pulses was used to produce plasmas which emitted strongly in the soft x-ray region. Spectral, temporal, and spatial characteristics of these plasma emissions are presented together with an application of the source to soft x-ray lithography.

© 1984 Optical Society of America

History
Original Manuscript: September 16, 1983
Published: May 1, 1984

Citation
David J. Nagel, Charles M. Brown, M. C. Peckerar, Marshall L. Ginter, J. A. Robinson, Thomas J. McIlrath, and P. K. Carroll, "Repetitively pulsed-plasma soft x-ray source," Appl. Opt. 23, 1428-1433 (1984)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-23-9-1428

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