A scanning monochromator system for the monitoring of thin-film deposition in a box coater is described. The system employs data from both a quartz crystal oscillator and a wideband transmission spectrometer. The spectrometer uses a holographic grating as its dispersive element and a CCD array to collect the data. All data are sent to a microcomputer where the information is displayed, stored, and analyzed. Several applications, including measurement of optical constants of inhomogeneous films and characterization of moisture adsorption, are discussed.
© 1985 Optical Society of America
Fred J. Van Milligen, Bertrand Bovard, Michael R. Jacobson, James Mueller, Ross Potoff, Richard L. Shoemaker, and H. Angus Macleod, "Development of an automated scanning monochromator for monitoring thin films," Appl. Opt. 24, 1799-1802 (1985)