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Applied Optics

Applied Optics


  • Vol. 24, Iss. 12 — Jun. 15, 1985
  • pp: 1803–1807

Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements

Bertrand Bovard, Fred J. Van Milligen, Michael J. Messerly, Steven G. Saxe, and H. Angus Macleod  »View Author Affiliations

Applied Optics, Vol. 24, Issue 12, pp. 1803-1807 (1985)

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The optical constants of a thin film on its structure. A technique, based on transmission measurements carried out in vacuo, has been developed to derive the profiles of the refractive index and extinction coefficient. The interpretation of the profiles gives information on the layer structure in vacuo. The technique can be used as a means of monitoring the variations of the optical constants with changes in the deposition parameters. This paper presents the technique, which is based on an envelope method, and gives some experimental results.

© 1985 Optical Society of America

Original Manuscript: December 6, 1984
Published: June 15, 1985

Bertrand Bovard, Fred J. Van Milligen, Michael J. Messerly, Steven G. Saxe, and H. Angus Macleod, "Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements," Appl. Opt. 24, 1803-1807 (1985)

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  1. H. A. Macleod, “Microstructure of Optical Thin Films,” Proc Soc. Photo-Opt. Instrum. Eng. 325, 21 (1982).
  2. C.-C. Lee, “Moisture Adsorption and Optical Instability in Thin Film Coatings,” Ph.D. Dissertation, U of Arizona (1983).
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  10. S. M. Bozic, Digital and Kalman Filtering. An Introduction to Discrete Time Filtering and Optimum Linear Estimation (Edward Arnold, London, 1979).

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