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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 24, Iss. 12 — Jun. 15, 1985
  • pp: 1803–1807

Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements

Bertrand Bovard, Fred J. Van Milligen, Michael J. Messerly, Steven G. Saxe, and H. Angus Macleod  »View Author Affiliations


Applied Optics, Vol. 24, Issue 12, pp. 1803-1807 (1985)
http://dx.doi.org/10.1364/AO.24.001803


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Abstract

The optical constants of a thin film on its structure. A technique, based on transmission measurements carried out in vacuo, has been developed to derive the profiles of the refractive index and extinction coefficient. The interpretation of the profiles gives information on the layer structure in vacuo. The technique can be used as a means of monitoring the variations of the optical constants with changes in the deposition parameters. This paper presents the technique, which is based on an envelope method, and gives some experimental results.

© 1985 Optical Society of America

History
Original Manuscript: December 6, 1984
Published: June 15, 1985

Citation
Bertrand Bovard, Fred J. Van Milligen, Michael J. Messerly, Steven G. Saxe, and H. Angus Macleod, "Optical constants derivation for an inhomogeneous thin film from in situ transmission measurements," Appl. Opt. 24, 1803-1807 (1985)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-24-12-1803


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References

  1. H. A. Macleod, “Microstructure of Optical Thin Films,” Proc Soc. Photo-Opt. Instrum. Eng. 325, 21 (1982).
  2. C.-C. Lee, “Moisture Adsorption and Optical Instability in Thin Film Coatings,” Ph.D. Dissertation, U of Arizona (1983).
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  5. B. Schmitt, Thèse de docteur ingénieur, “Problèmes de réalisation des filtres spectraux multidiélectriques: contrôle simultané de l'indice de réfraction et de l'épaisseur des couches en cours de formation,” Ecole Nationale Supérieure de Physique, Marseille (1983).
  6. J. C. Manifacier, J. Gasiot, J. P. Fillard, “A Simple Method for the Determination of the Optical Constants n, k and the Thickness of a Weakly Absorbing Thin Film,” J. Phys. 9, 1002 (1976).
  7. R. Swanepool. “Determination of the Thickness and Optical Constants of Amorphous Silicon,” J. Phys. E 16, 1214 (1983). [CrossRef]
  8. D. P. Arndt et al., “Multiple Determination of the Optical Constants of Thin-Film Coating Materials,” Appl. Opt. 23, 3571 (1984). [CrossRef] [PubMed]
  9. R. Jacobsson, “Inhomogeneous and Coevaporated Homogeneous Films for Optical Applications,” Phys. Thin Films 8, 51 (1975).
  10. S. M. Bozic, Digital and Kalman Filtering. An Introduction to Discrete Time Filtering and Optimum Linear Estimation (Edward Arnold, London, 1979).

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