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Applied Optics

Applied Optics


  • Vol. 24, Iss. 18 — Sep. 15, 1985
  • pp: 3049–3052

Phase shifter calibration in phase-shifting interferometry

Yeou-Yen Cheng and James C. Wyant  »View Author Affiliations

Applied Optics, Vol. 24, Issue 18, pp. 3049-3052 (1985)

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This paper describes some practical methods to calibrate the phase shifter in phase-shifting interferometry (PSI). The phase shifter used in the experiment is a piezoelectric transducer (PZT) that has a nonlinearity of <1%. Using the quantitative method described in this paper, the repeatability in the measurement of the phase-shifting angle is ~0.046° rms, and the 3σ value is 0.139°. A calibration-insensitive phase calculation algorithm is discussed and compared with other synchronous detection equations (e.g., the three-bucket or the four-bucket method). Experimental results verify the calibration-insensitive mechanism of the self-calibrating algorithm.

© 1985 Optical Society of America

Original Manuscript: February 25, 1985
Published: September 15, 1985

Yeou-Yen Cheng and James C. Wyant, "Phase shifter calibration in phase-shifting interferometry," Appl. Opt. 24, 3049-3052 (1985)

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