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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 24, Iss. 18 — Sep. 15, 1985
  • pp: 3049–3052

Phase shifter calibration in phase-shifting interferometry

Yeou-Yen Cheng and James C. Wyant  »View Author Affiliations


Applied Optics, Vol. 24, Issue 18, pp. 3049-3052 (1985)
http://dx.doi.org/10.1364/AO.24.003049


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Abstract

This paper describes some practical methods to calibrate the phase shifter in phase-shifting interferometry (PSI). The phase shifter used in the experiment is a piezoelectric transducer (PZT) that has a nonlinearity of <1%. Using the quantitative method described in this paper, the repeatability in the measurement of the phase-shifting angle is ~0.046° rms, and the 3σ value is 0.139°. A calibration-insensitive phase calculation algorithm is discussed and compared with other synchronous detection equations (e.g., the three-bucket or the four-bucket method). Experimental results verify the calibration-insensitive mechanism of the self-calibrating algorithm.

© 1985 Optical Society of America

History
Original Manuscript: February 25, 1985
Published: September 15, 1985

Citation
Yeou-Yen Cheng and James C. Wyant, "Phase shifter calibration in phase-shifting interferometry," Appl. Opt. 24, 3049-3052 (1985)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-24-18-3049


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References

  1. J. H. Bruning, “Fringe Scanning Interferometers,” in Optical Shop Testing, D. Malacara, Ed. (Wiley, New York, 1978).
  2. C. Koliopoulos, “Interferometric Optical Phase Measurement Techniques,” Ph.D. Dissertation, Optical Sciences Center, U. Arizona (1981).
  3. J. Schwider, R. Burow, K. E. Elssner, J. Grzanna, R. Spolaczyk, K. Merkel, “Digital Wave-Front Measuring Interferometry: Some Systematic Error Sources,” Appl. Opt. 22, 3421 (1983). [CrossRef] [PubMed]
  4. J. B. Hayes, “Linear Methods of Computer Controlled Optical Figuring,” Ph.D. Dissertation, Optical Sciences Center, U. Arizona (1984).
  5. P. Carré, “Installation et utilisation du comparateur photoélectrique et interférentiel du Bureau International des Poids et Mesures,” Metrologia 2, 13 (1966). [CrossRef]

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