Experimental diffraction characteristics of dielectric transmission gratings on planar optical waveguides are compared to theoretical results from the rigorous coupled-wave analysis. The deep-grooved square gratings are shown to have high diffraction efficiency (>90%). In particular, the effects of higher orders of diffraction on the diffraction efficiency, at fixed wavelength, are presented in this paper for both TE and TM polarizations. The rigorous coupled-wave analysis is shown to produce excellent general agreement with the measured diffraction characteristics.
© 1985 Optical Society of America
Jean-Marc P. Delavaux, William S. C. Chang, and M. G. Moharam, "Comparison of the experimental and theoretical diffraction characteristics of transmission gratings on planar dielectric waveguides," Appl. Opt. 24, 221-226 (1985)