A new type of interferometric measuring technique has been developed to make precise measurements of periphery surface shapes, such as toroidal surfaces and raceway surfaces of bearings. The measuring apparatus consists of a Fizeau interferometer, a rotating air spindle unit, and a microcomputer system. The raceway shape along the cross section is measured at each rotating angle until the entire surface data are stored in the computer memory. The fringe data at each angle are displayed two dimensionally using a TV frame memory to obtain a peri-interferogram. The surface of a 6203 inner ball bearing raceway can be measured successfully with an accuracy of within 100 nm.

© 1985 Optical Society of America

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