OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 24, Iss. 8 — Apr. 15, 1985
  • pp: 1142–1146

Response curve for photosensitive films: a derivative method

Lucila Cescato, Geraldo F. Mendes, and Jaime Frejlich  »View Author Affiliations


Applied Optics, Vol. 24, Issue 8, pp. 1142-1146 (1985)
http://dx.doi.org/10.1364/AO.24.001142


View Full Text Article

Enhanced HTML    Acrobat PDF (517 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A derivative technique is developed for measuring the material response of photosensitive films. The method consists of recording a low modulated grating superimposed with different uniform preexposures. The modulation of the resulting shallow gratings recorded on the photosensitive film is measured by diffraction techniques and the derivative response is thus computed. Compared with other diffraction-based methods, this one is not affected by nonlinearities. Qualitative visual monitoring of these diffraction data may be used for optimizing materials and processes in photolithography and optical recording. Some experimental results concerning positive and negative photoresists are presented.

© 1985 Optical Society of America

History
Original Manuscript: October 20, 1984
Published: April 15, 1985

Citation
Lucila Cescato, Geraldo F. Mendes, and Jaime Frejlich, "Response curve for photosensitive films: a derivative method," Appl. Opt. 24, 1142-1146 (1985)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-24-8-1142


Sort:  Author  |  Year  |  Journal  |  Reset  

References

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited