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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 24, Iss. 8 — Apr. 15, 1985
  • pp: 1142–1146

Response curve for photosensitive films: a derivative method

Lucila Cescato, Geraldo F. Mendes, and Jaime Frejlich  »View Author Affiliations


Applied Optics, Vol. 24, Issue 8, pp. 1142-1146 (1985)
http://dx.doi.org/10.1364/AO.24.001142


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Abstract

A derivative technique is developed for measuring the material response of photosensitive films. The method consists of recording a low modulated grating superimposed with different uniform preexposures. The modulation of the resulting shallow gratings recorded on the photosensitive film is measured by diffraction techniques and the derivative response is thus computed. Compared with other diffraction-based methods, this one is not affected by nonlinearities. Qualitative visual monitoring of these diffraction data may be used for optimizing materials and processes in photolithography and optical recording. Some experimental results concerning positive and negative photoresists are presented.

© 1985 Optical Society of America

History
Original Manuscript: October 20, 1984
Published: April 15, 1985

Citation
Lucila Cescato, Geraldo F. Mendes, and Jaime Frejlich, "Response curve for photosensitive films: a derivative method," Appl. Opt. 24, 1142-1146 (1985)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-24-8-1142

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