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Applied Optics

Applied Optics


  • Vol. 25, Iss. 14 — Jul. 15, 1986
  • pp: 2372–2374

Surface profiling by phase-locked interferometry

Hubert J. Matthews, Douglas K. Hamilton, and Colin J. R. Sheppard  »View Author Affiliations

Applied Optics, Vol. 25, Issue 14, pp. 2372-2374 (1986)

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A noncontacting surface profiling technique with 1-nm height resolution is described. A feedback arrangement keeps in quadrature the two arms of a confocal interference microscope by modulating the reference beam using an electrooptic phase modulator.

© 1986 Optical Society of America

Original Manuscript: January 28, 1986
Published: July 15, 1986

Hubert J. Matthews, Douglas K. Hamilton, and Colin J. R. Sheppard, "Surface profiling by phase-locked interferometry," Appl. Opt. 25, 2372-2374 (1986)

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  1. C.-C. Huang, “Optical Heterodyne Profilometer,” Opt. Eng. 23, 365 (1984).
  2. G. E. Sommargren, “Optical Heterodyne Profilometry,” Appl. Opt. 20, 610 (1981). [CrossRef] [PubMed]
  3. R. L. Jungerman, P. C. D. Hobbs, G. S. Kino, “Phase Sensitive Scanning Optical Microscope,” Appl. Phys. Lett. 45, 846 (1984). [CrossRef]
  4. D. K. Hamilton, H. J. Matthews, “The Confocal Interference Microscope as a Surface Profilometer,” Optik 71, 31 (1985).
  5. D. K. Hamilton, C. J. R. Sheppard, “A Confocal Interference Microscope,” Opt. Acta 29, 1573 (1982). [CrossRef]
  6. C. J. R. Sheppard, T. Wilson, “Effects of High Angles of Convergence on V(2) in the Scanning Acoustic Microscope,” Appl. Phys. Lett. 38, 858 (1981). [CrossRef]
  7. A. Yariv, Quantum Electronics (Wiley, New York, 1967), pp. 341–342.
  8. D. C. Leiner, D. T. Moore, “Real-time Phase Microscopy using a Phase-locked Interferometer,” Rev. Sci. Instrum. 49, 1702 (1978). [CrossRef] [PubMed]

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