A theoretical analysis of the measurement accuracy in sinusoidal phase modulating (SPM) interferometry is presented. The measurement accuracy is dependent on multiplicative and additive noise. The characteristics of SPM interferometry in the presence of this noise are made clear. Theoretical results show clearly that SPM interferometry has a high measurement accuracy of the order of 1 nm.
© 1986 Optical Society of America
Original Manuscript: March 18, 1986
Published: September 15, 1986
Osami Sasaki and Hirokazu Okazaki, "Analysis of measurement accuracy in sinusoidal phase modulating interferometry," Appl. Opt. 25, 3152-3158 (1986)