The topography of vacuum-deposited aluminum films with different morphologies has been characterized by the angular distribution of the intensity of the diffusely scattered light. The results of these measurements are compared with morphological data obtained by the stylus technique and the SEM. It is shown that light scattering is a suitable technique for the characterization of such surfaces. The scattering spectrum is a fingerprint of the surface, and quantitative data can be obtained.
© 1986 Optical Society of America
Maarten J. Verkerk and Ivo J. M. M. Raaymakers, "Characterization of the topography of vacuum-deposited films. 1: Light scattering," Appl. Opt. 25, 3602-3609 (1986)