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Applied Optics

Applied Optics


  • Vol. 25, Iss. 20 — Oct. 15, 1986
  • pp: 3616–3622

Depolarization and cross polarization in ellipsometry of rough surfaces

Molly W. Williams  »View Author Affiliations

Applied Optics, Vol. 25, Issue 20, pp. 3616-3622 (1986)

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In ellipsometry of rough surfaces, the commonly used parameters, psi and delta, are insufficient to characterize completely the changes in polarization state which occur when light is reflected from a rough surface. When an experimentally determined Mueller matrix is available, parameters indicative of depolarization, cross polarization, and change in ellipticity can be found. When the Mueller matrix is regarded as an operator mapping input polarization states depicted on a Poincaré sphere to output states in a similar coordinate system, these new parameters can be illustrated in terms of their effects on the Poincaré sphere. The depolarization and cross polarization parameters correlate with specimen roughness and reflectance.

© 1986 Optical Society of America

Original Manuscript: June 4, 1986
Published: October 15, 1986

Molly W. Williams, "Depolarization and cross polarization in ellipsometry of rough surfaces," Appl. Opt. 25, 3616-3622 (1986)

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  1. A complete overview of ellipsometry is contained in R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  2. P. S. Hauge, “Mueller Matrix Ellipsometry with Imperfect Compensators,” J. Opt. Soc. Am. 68, 1519 (1978). [CrossRef]
  3. R. M. A. Azzam, “Photopolarimetric Measurement of the Mueller Matrix by Fourier Analysis of a Single Detected Signal,” Opt. Lett. 5, 148 (1978). [CrossRef]
  4. D. E. Aspnes, “Fourier Transform Detection System for Rotating Analyzer Ellipsometers,” Opt. Commun. 8, 222 (1973). [CrossRef]
  5. D. A. Ramsey, “Mueller Matrix Ellipsometry Involving Extremely Rough Surfaces,” Doctoral Dissertation, U. Michigan, Ann Arbor (1985).
  6. R. H. Muller, “Definitions and Conventions in Ellipsometry,” Surf. Sci. 16, 14 (1969). [CrossRef]
  7. P. S. Hauge, R. H. Muller, C. G. Smith, “Conventions and Formulas for Using the Mueller-Stokes Calculus in Ellipsometry,” Surf. Sci. 96, 81 (1980). [CrossRef]
  8. Ref. 1, p. 491.
  9. Introductory explanations of the Poincaré sphere are contained in the following three books: D. Clark, J. F. Grainger, Polarized Light and Optical Measurement (Pergamon, New York, 1971); W. A. Shurcliff, S. S. Ballard, Polarized Light (Van Nostrand, Princeton, NJ, 1964); W. A. Shurcliff, Polarized Light (Harvard U. P., Cambridge, MA, 1962).
  10. All the experimental Mueller matrices used in this paper were originally published in Ref. 5.

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