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Applied Optics

Applied Optics


  • Vol. 25, Iss. 20 — Oct. 15, 1986
  • pp: 3631–3634

Influence of metal films on the optical scatter and related microstructure of coated surfaces

Ghanim A. Al-Jumaily, S. R. Wilson, J. J. McNally, J. R. McNeil, Jean M. Bennett, and H. H. Hurt  »View Author Affiliations

Applied Optics, Vol. 25, Issue 20, pp. 3631-3634 (1986)

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Deposition of 0.1–1.0-μm thick metal on a CaF2 coated Si wafer causes a reduction in optical scatter and related microroughness. This effect is not observed when the coated surfaces are examined using a surface profilometer (Talystep). Scanning electron micrographs indicate that coated surfaces are smoother than uncoated surfaces.

© 1986 Optical Society of America

Original Manuscript: February 24, 1986
Published: October 15, 1986

Ghanim A. Al-Jumaily, S. R. Wilson, J. J. McNally, J. R. McNeil, Jean M. Bennett, and H. H. Hurt, "Influence of metal films on the optical scatter and related microstructure of coated surfaces," Appl. Opt. 25, 3631-3634 (1986)

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  1. J. R. McNeil, W. C. Herrmann, “Ion Beam Applications for Precision Infrared Optics,” J. Vac. Sci. Technol. 20, 324 (1982). [CrossRef]
  2. J. R. McNeil, L. J. Wei, G. A. Al-Jumaily, S. Shakir, J. McIver, “Surface Smoothing Effects of Thin Films?,” Appl. Opt. 24, 480 (1985); see also J. R. McNeil, L. J. Wei, J. Casstevens, W. C. Herrmann, J. C. Stover, “Light Scattering Characteristics of Some Metal Surface—A Smoothing Effect?,” in Proceedings, Fifteenth Annual Symposium for Optical Materials for High Power Lasers, Boulder, CO (Nov. 1983). [CrossRef] [PubMed]
  3. G. A. Al-Jumaily, J. J. McNally, J. R. McNeil, W. C. Herrmann, “Effects of Ion Assisted Deposition on Optical Scatter and Related Microstructure of Thin Films,” J. Vac. Sci. Technol. A3, 651 (1985).
  4. E. L. Church, H. A. Jenkinson, J. M. Zavada, “Relationship Between Surface Scattering and Microtopographic Features,” Opt. Eng. 18, 125 (1979). [CrossRef]
  5. H. E. Bennett, “Scattering Characteristics of Optical Materials,” Opt. Eng. 17, 480 (1978). [CrossRef]
  6. J. M. Elson, J. M. Bennett, “Relation Between the Angular Dependence of Scattering and the Statistical Properties of Optical Surfaces,” J. Opt. Soc. Am. 69, 31 (1979). [CrossRef]
  7. J. M. Bennett, J. H. Dancy, “Stylus Profiling Instrument for Measuring Statistical Properties of Smooth Optical Surfaces,” Appl. Opt. 20, 1785 (1981). [CrossRef] [PubMed]
  8. H. E. Bennett, J. M. Bennett, E. J. Ashley, R. J. Motyka, “Verification of the Anamalous-Skin-Effect Theory for Silver in the Infrared,” Phys. Rev. 165, 755 (1968). [CrossRef]
  9. Y. Namba, T. Mori, “Cross-sectional Structure of Bi Films and Its Phenominological Analysis,” J. Appl. Phys. 46, 1159 (1975). [CrossRef]
  10. G. A. Al-Jumaily, S. R. Wilson, J. R. McNeil, “A Comparison of the Frequency Response of a Mechanical Profilometer and an Optical Scatterometer,” in stray Radiation V, R. P. Breault, Ed., Proc. SPIE 675.

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