Deposition of 0.1–1.0-µm thick metal on a CaF2 coated Si wafer causes a reduction in optical scatter and related microroughness. This effect is not observed when the coated surfaces are examined using a surface profilometer (Talystep). Scanning electron micrographs indicate that coated surfaces are smoother than uncoated surfaces.
© 1986 Optical Society of America
Ghanim A. Al-Jumaily, S. R. Wilson, J. J. McNally, J. R. McNeil, Jean M. Bennett, and H. H. Hurt, "Influence of metal films on the optical scatter and related microstructure of coated surfaces," Appl. Opt. 25, 3631-3634 (1986)