A new method for testing both refractive and reflective optical components using beam deflection is presented. For a beam with a 80-µm waist, 1-µrad deflections are detectable from a reflecting test surface. This corresponds to an average height resolution in the reflecting surface of eight-tenths of an angstrom over the dimensions of the beam.
© 1986 Optical Society of America
Frank V. Kowalski, Thomas E. Milner, Jr., and Mickel J. Stanich, "Beam deflection as a method for testing optical components," Appl. Opt. 25, 3735-3739 (1986)