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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 25, Iss. 21 — Nov. 1, 1986
  • pp: 3808–3809

Synthesis of silicon nitride and silicon oxide films by ion-assisted deposition

R. P. Netterfield, P. J. Martin, and W. G. Sainty  »View Author Affiliations


Applied Optics, Vol. 25, Issue 21, pp. 3808-3809 (1986)
http://dx.doi.org/10.1364/AO.25.003808


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History
Original Manuscript: June 16, 1986
Published: November 1, 1986

Citation
R. P. Netterfield, P. J. Martin, and W. G. Sainty, "Synthesis of silicon nitride and silicon oxide films by ion-assisted deposition," Appl. Opt. 25, 3808-3809 (1986)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-25-21-3808


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References

  1. P. M. Martin, W. T. Pawlewicz, D. Coult, J. Jones, “Observation of Exceptional Temperature Humidity Stability in Multilayer Filter Coatings,” Appl. Opt. 23, 2668 (1984). [CrossRef] [PubMed]
  2. C.-E. Morosanu, “The Preparation, Characterization and Applications of Silicon Nitride Thin Films,” Thin Solid Films 65, 171 (1980). [CrossRef]
  3. C. Weissmantel, G. Reisse, H. J. Erler, F. Henny, K. Bewilogue, V. Ebersbach, C. Shurer, “Preparation of Hard Coatings by Ion Beam Methods,” Thin Solid Films 63, 315 (1979). [CrossRef]
  4. P. M. Martin, G. J. Exarhos, “Relationships between Stress, Composition, and Microstructure in Sputtered Silicon Nitride,” J. Vac. Sci. Technol. A 3, 615 (1985). [CrossRef]
  5. W. T. Pawlewicz, P. M. Martin, D. D. Hays, I. B. Mann, “Recent Developments in Reactively Sputtered Optical Thin Films,” Proc. Soc. Photo-Opt. Instrum. Eng. 325, 105 (1982).
  6. V. A. Burdovitsin, “Silicon Nitride and Oxynitride Films Prepared by Ion Beam Reactive Sputtering,” Thin Solid Films 105, 197 (1983). [CrossRef]
  7. T. S. Eriksson, C. G. Granqvist, “Infrared Optical Properties of Electron-Beam Evaporated Silicon Oxynitride Films,” Appl. Opt. 22, 3204 (1983). [CrossRef] [PubMed]
  8. W. Heitmann, “Properties of Evaporated SiO2, SiOxNy, and TiO2 Films,” Appl. Opt. 10, 1685 (1971). [CrossRef]
  9. R. P. Netterfield, P. J. Martin, W. G. Sainty, R. M. Duffy, C. G. Pacey, “Characterization of Growing Thin Films by in-situ Ellipsometry, Spectral Reflectance and Transmittance Measurements, and Ion-Scattering Spectroscopy,” Rev. Sci. Instrum. 56, 1995 (1985). [CrossRef]
  10. L. N. Binh, R. P. Netterfield, P. J. Martin, “Low-Loss Waveguide in Ion-Assisted Deposited Thin Films,” Appl. Surf. Sci. 22/23, 656 (1985). [CrossRef]
  11. H. A. Macleod, Thin-film Optical Filters (American Elsevier, New York, 1969), p. 42.
  12. M. S. Perlmutter, K. R. Martin, “Ion Beam Sputtered Antireflection Coatings of Fused Silica Substrates,” in Technical Digest, Topical Meeting on Optical Interference Coatings (Optical Society of America, Washington, DC, 1984), paper ThA-C4.

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