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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 25, Iss. 24 — Dec. 15, 1986
  • pp: 4557–4561

Determination of thickness and optical constants of thin films from photometric and ellipsometric measurements

Eduardo Elizalde, Jean Marc Frigerio, and Josette Rivory  »View Author Affiliations


Applied Optics, Vol. 25, Issue 24, pp. 4557-4561 (1986)
http://dx.doi.org/10.1364/AO.25.004557


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Abstract

We describe a computational method of determining the optical constants n(λ),k(λ) and the film thickness d from photometric R(λ),T(λ) and ellipsometric Ψ(λ),Δ(λ) data. Combinations of three or four of the measured quantities are compared using Newton-Raphson and Simplex techniques. The method is applied to thin films of gold and amorphous metallic alloys. The results are discussed.

© 1986 Optical Society of America

History
Original Manuscript: May 23, 1986
Published: December 15, 1986

Citation
Eduardo Elizalde, Jean Marc Frigerio, and Josette Rivory, "Determination of thickness and optical constants of thin films from photometric and ellipsometric measurements," Appl. Opt. 25, 4557-4561 (1986)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-25-24-4557

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