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Applied Optics

Applied Optics


  • Vol. 25, Iss. 9 — May. 1, 1986
  • pp: 1499–1504

Embossing technique for fabricating surface relief gratings on hard oxide waveguides

K. Heuberger and W. Lukosz  »View Author Affiliations

Applied Optics, Vol. 25, Issue 9, pp. 1499-1504 (1986)

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Surface relief gratings with 1200, 2400, and 3600 lines/mm on planar SiO2–TiO2 waveguides were fabricated by a combination of a dipcoating method (sol gel process) with an embossing technique. The grating is embossed into a deformable gel film, which by subsequent heat treatment is transformed into an oxide waveguiding film. During the heat treatment the film thickness shrinks to about one-fourth of its value directly after the embossing. Values of the process parameters, e.g., of the embossing pressure, are given with which input and output grating couplers of good quality were fabricated. Measurements of input and output efficiencies are reported; incoupling efficiencies up to ∼28% were obtained.

© 1986 Optical Society of America

Original Manuscript: October 11, 1985
Published: May 1, 1986

K. Heuberger and W. Lukosz, "Embossing technique for fabricating surface relief gratings on hard oxide waveguides," Appl. Opt. 25, 1499-1504 (1986)

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  1. W. Lukosz, K. Tiefenthaler, “Embossing Technique for Fabricating Integrated Optical Components in Hard Inorganic Waveguiding Materials,” Opt. Lett. 8, 537 (1983). [CrossRef] [PubMed]
  2. K. Tiefenthaler, V. Briguet, E. Buser, M. Horisberger, W. Lukosz, “Preparation of Planar SiO2–TiO2 and LiNbO3 Wave-guides with a Dipcoating Method and an Embossing Technique for Producing Grating Couplers and Channel Waveguides,” Proc. Soc. Photo-Opt. Instrum. Eng. 401, 165 (1983).
  3. K. Tiefenthaler, W. Lukosz, “Integrated Optical Switches and Gas Sensors,” Opt. Lett. 9, 137 (1984). [CrossRef] [PubMed]
  4. W. Lukosz, K. Tiefenthaler, “Directional Switching in Planar Waveguides Effected by Adsorption—Desorption Processes,” in Technical Digest, Second European Conference on Integrated Optics, Florence, 1983, Conf. Publ. 227 (IEE, London, 1983), pp. 152–155.
  5. K. Tiefenthaler, W. Lukosz, “Integrated Optical Humidity and Gas Sensors,” Proc. Soc. Photo-Opt. Instrum. Eng. 514, 275 (1984).
  6. K. Tiefenthaler, W. Lukosz, “Grating Couplers as Integrated Optical Humidity and Gas Sensors,” Thin Solid Films 126, 205 (1985). [CrossRef]
  7. V. Briguet, ETH Zuerich, private communication;W. Lukosz, V. Briguet, “Novel Integrated Thermo-Optic Switches,” Thin Solid Films 126, 197 (1985). [CrossRef]
  8. W. Lukosz, V. Briguet, “Light-Induced-Desorption: A New Mechanism for Bistability in Integrated Optical Devices,” Meeting ‘Optical Bistability 3’, Tucson, December 1985 (Springer, New York, 1986, in press).

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