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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 26, Iss. 14 — Jul. 15, 1987
  • pp: 2810–2816

Step height measurement using two-wavelength phase-shifting interferometry

Katherine Creath  »View Author Affiliations


Applied Optics, Vol. 26, Issue 14, pp. 2810-2816 (1987)
http://dx.doi.org/10.1364/AO.26.002810


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Abstract

Two-wavelength phase-shifting interferometry is applied to an interference phase-measuring microscope enabling the measurement of step features. The surface is effectively tested at a synthesized equivalent wavelength λeq = λaλb/|λa − λb| by subtracting phase measurements made at visible wavelengths λa and λb. The rms repeatability of the technique is λ/1000 at the equivalent wavelength. To improve the precision of the data, the phase ambiguities in the single-wavelength data are removed using the equivalent wavelength results to determine fringe orders. When this correction is made, a measurement dynamic range (feature height/rms repeatability) of 104 is obtainable. Results using this technique are shown for the measurement of an optical waveguide and a deeply modulated grating.

© 1987 Optical Society of America

History
Original Manuscript: March 6, 1987
Published: July 15, 1987

Citation
Katherine Creath, "Step height measurement using two-wavelength phase-shifting interferometry," Appl. Opt. 26, 2810-2816 (1987)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-26-14-2810

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