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Applied Optics

Applied Optics


  • Vol. 26, Iss. 16 — Aug. 15, 1987
  • pp: 3425–3427

Direct measurement of nanometric displacement under an optical microscope

Shinji Kamimura  »View Author Affiliations

Applied Optics, Vol. 26, Issue 16, pp. 3425-3427 (1987)

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A novel method has been developed to measure nanometric displacement under a conventional optical microscope. The magnified image of a pinhole was divided into two parts using a prism-shaped mirror. The difference of light intensity between the divided images was determined, which was proportional to displacement of the pinhole. Using a 5-μm diam pinhole, the accuracy to determine displacement was ∼1 nm. Instead of a pinhole, polystyrene microbeads were used in the new method. Displacement of the microbeads was also measured with nanometric accuracy. This technique could be used to probe nanometric phenomena using optical microscopes.

© 1987 Optical Society of America

Original Manuscript: March 24, 1987
Published: August 15, 1987

Shinji Kamimura, "Direct measurement of nanometric displacement under an optical microscope," Appl. Opt. 26, 3425-3427 (1987)

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