Step response and spatial resolution of an optical heterodyne profiling instrument

Dan Pantzer

doi:10.1364/AO.26.003915

Applied Optics
Vol. 26,
Issue 18,
pp. 3915-3918
(1987)
•https://doi.org/10.1364/AO.26.003915

Step response and spatial resolution of an optical heterodyne profiling instrument

Dan Pantzer

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Dan Pantzer, "Step response and spatial resolution of an optical heterodyne profiling instrument," Appl. Opt. 26, 3915-3918 (1987)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

An optical heterodyne instrument for measuring profiles of smooth surfaces has been developed. The instrument is intended for measuring very small deviations from the mean surface height but is demonstrated to be capable of measuring step heights of several hundred nanometers. The step response and the spatial resolution of the instrument are calculated and experimentally verified.

Full Article | PDF Article

More Like This

Heterodyne profiling instrument for the angstrom region

Dan Pantzer, Jacob Politch, and Leif Ek
Appl. Opt. 25(22) 4168-4172 (1986)

Comparison of instruments for measuring step heights and surface profiles

Jean M. Bennett
Appl. Opt. 24(22) 3766-3772 (1985)

Instrumental noise effect in an optical heterodyne profiler

Yao Lin, John Schill, and Run-Wen Wang
Appl. Opt. 33(22) 5005-5010 (1994)

Previous Article Next Article

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (15)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Groove Width (mm)	Step Height (Å)	Height Error (Å)	Height Error (%)
100.00	100.00	−0.0013	0.0000
200.00	99.99	−0.0051	0.0001
300.00	99.99	−0.0117	0.0001
400.00	99.98	−0.0213	0.0002
500.00	99.97	−0.0341	0.0003
600.00	99.95	−0.0510	0.0005
700.00	99.93	−0.0728	0.0007
800.00	99.90	−0.1019	0.0010
900.00	99.86	−0.1438	0.0014
1000.00	99.75	−0.2495	0.0025
1100.00	99.75	−0.2549	0.0025
1200.00	99.75	−0.2549	0.0025
1300.00	99.75	−0.2549	0.0025

Groove Width (mm)	Step Height (Å)	Height Error (Å)	Height Error (%)
100.00	999.99	−0.0114	0.0000
200.00	999.95	−0.0482	0.0000
300.00	999.89	−0.1149	0.0001
400.00	999.78	−0.2158	0.0002
500.00	999.64	−0.3563	0.0004
600.00	999.46	−0.5428	0.0005
700.00	999.21	−0.7861	0.0008
800.00	998.89	−1.1079	0.0011
900.00	998.43	−1.5668	0.0016
1000.00	997.28	−2.7200	0.0027
1100.00	997.22	−2.7786	0.0028
1200.00	997.22	−2.7786	0.0028
1300.00	997.22	−2.7786	0.0028

Focal spot diameter (μm)	Loss of lateral resolution (%)	Maximum surface roughness (μm)
1	1	0.35
1	10	1.14
3	1	3.17
3	10	10.2

Groove Width (mm)	Step Height (Å)	Height Error (Å)	Height Error (%)
100.00	100.00	−0.0013	0.0000
200.00	99.99	−0.0051	0.0001
300.00	99.99	−0.0117	0.0001
400.00	99.98	−0.0213	0.0002
500.00	99.97	−0.0341	0.0003
600.00	99.95	−0.0510	0.0005
700.00	99.93	−0.0728	0.0007
800.00	99.90	−0.1019	0.0010
900.00	99.86	−0.1438	0.0014
1000.00	99.75	−0.2495	0.0025
1100.00	99.75	−0.2549	0.0025
1200.00	99.75	−0.2549	0.0025
1300.00	99.75	−0.2549	0.0025

Groove Width (mm)	Step Height (Å)	Height Error (Å)	Height Error (%)
100.00	999.99	−0.0114	0.0000
200.00	999.95	−0.0482	0.0000
300.00	999.89	−0.1149	0.0001
400.00	999.78	−0.2158	0.0002
500.00	999.64	−0.3563	0.0004
600.00	999.46	−0.5428	0.0005
700.00	999.21	−0.7861	0.0008
800.00	998.89	−1.1079	0.0011
900.00	998.43	−1.5668	0.0016
1000.00	997.28	−2.7200	0.0027
1100.00	997.22	−2.7786	0.0028
1200.00	997.22	−2.7786	0.0028
1300.00	997.22	−2.7786	0.0028

Abstract

Cited By

Figures (6)

Tables (3)

Equations (15)

Applied Optics